Vintage LED displays (Part 1)

Here are some vintage LED displays that I have in my collection. All pictures was made with with Zeiss optical microscope. 

HPDL1414 / DL1414 (Four digit bubble display, 1981) 

Led wafer was made in 1978 by Litronix

HPDL1414 (Smart Alphanumeric display, 1999)

MSD2313 (5x7 matrix display for military applications, 1989)

(MSD2313 driver die, 1986)